This inventor holds 3 USPTO granted patents. Top assignees: Ultratech Stepper, Inc., Euv LLC.. Active years: 2000-2004.
Location History:
- Pelham, NH (US) (2000)
- Windham, NH (US) (2002 - 2004)
Company Filing History:
Years Active: 2000-2004
Title: Mark E Williams: Innovator in Magnetic Levitation Technology
Introduction
Mark E Williams is a notable inventor based in Windham, NH (US). He has made significant contributions to the field of magnetic levitation technology, holding a total of 3 patents. His innovative designs have advanced the capabilities of precision positioning systems.
Latest Patents
One of his latest patents is the "Magnetic levitation stage apparatus and method." This invention features a maglev stage that includes a movable platen capable of supporting a workpiece. The design incorporates a set of magnet arrays on the bottom surface of the platen, along with side magnet arrays on opposite sides. The support frame surrounds the platen, and motor coils are arranged to enable magnetic levitation and movement in up to six degrees of freedom (DOF). This allows for smooth and precise operations, facilitated by movable counterweights.
Another significant patent is the "Extreme-UV scanning wafer and reticle stages." This invention provides a stage for precise positioning of a chuck in three orthogonal linear axes and three orthogonal rotation axes. It includes a monolithic mirror that supports the chuck, electromagnetic actuators for fine and coarse positioning, and a position sensor for measuring vertical positions. The design also features a stepping axis beam and a cable stage subassembly, enhancing its functionality in advanced manufacturing processes.
Career Highlights
Mark E Williams has worked with several companies throughout his career, including Ultratech Stepper, Inc. and EUV LLC. His experience in these organizations has contributed to his expertise in developing cutting-edge technologies in the field of precision engineering.
Collaborations
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Conclusion
Mark E Williams is a prominent figure in the realm of magnetic levitation technology, with a focus on precision positioning systems. His innovative patents reflect his commitment to advancing engineering solutions. His work continues to influence the industry and inspire future innovations.