Fujisawa, Japan

Mariko Sato



Average Co-Inventor Count = 3.0

ph-index = 1


Company Filing History:


Years Active: 2018-2019

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3 patents (USPTO):Explore Patents

Title: Mariko Sato: A Trailblazer in Semiconductor Innovations

Introduction

Mariko Sato is an innovative inventor based in Fujisawa, Japan, renowned for her contributions to semiconductor technology. With three patents to her name, her work focuses on advancing the manufacturing processes of silicon carbide (SiC) substrates, which are essential for modern electronic devices.

Latest Patents

Mariko Sato's latest patents embody groundbreaking methods in semiconductor manufacturing. One of her notable patents is a **Manufacturing Method of SiC Substrate**, which introduces a technique for etching the surface of an SiC substrate using atomic hydrogen while the substrate is heated. This method allows for a flattened surface and can be performed at temperatures between 800°C and 1200°C.

Another significant patent is the **Manufacture Method of Gate Insulating Film for Silicon Carbide Semiconductor Device**. This innovation describes a process for creating a high-quality gate insulating film on an SiC substrate that maintains the structure of a silicon oxynitride (SiON) film. The method involves preparing a transfer plate and transferring the insulating film onto the surface-processed substrate to enhance the device's performance.

Career Highlights

Mariko Sato works at Fuji Electric Co., Ltd., a respected firm in the field of electrical equipment and semiconductor technology. Her expertise and innovative spirit have significantly advanced the company's research and development efforts.

Collaborations

Throughout her career, Mariko has collaborated with esteemed colleagues, including Takeshi Fujii and Takuro Inamoto. These partnerships illustrate her commitment to teamwork and her belief that collaborative efforts lead to greater innovations in technology.

Conclusion

Mariko Sato stands out as a formidable inventor in the semiconductor industry. Her patents reflect a deep understanding of material science and innovative manufacturing processes. As the industry evolves, Sato's contributions will undoubtedly play a crucial role in shaping the future of semiconductor devices.

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