Mountain View, CA, United States of America

Marc T Aho


Average Co-Inventor Count = 2.6

ph-index = 3

Forward Citations = 29(Granted Patents)


Location History:

  • Aptos, CA (US) (2007 - 2009)
  • Mountain View, CA (US) (2008 - 2011)

Company Filing History:


Years Active: 2007-2011

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9 patents (USPTO):Explore Patents

Title: Innovations of Marc T Aho

Introduction

Marc T Aho is a notable inventor based in Mountain View, CA (US). He has made significant contributions to the field of technology, holding a total of 9 patents. His work primarily focuses on advancements in photomask handling and wafer testing systems.

Latest Patents

Among his latest patents is the "Automated spatial flipping apparatus and system for photomasks and photomasks with pellicles." This innovative spatial photomask flipper allows for up to four access gates for unloading a clamped photomask after its reorientation along a single transfer axis. The design includes a locking control cam that secures the clamping frames, preventing inadvertent openings in any orientation other than the two main flip orientations. The system is enhanced by a digital camera and an image recognition algorithm that can interpret the initial loading orientation of the photomask. Additionally, it features a pellicle detection sensor for automatic detection of pellicles on the photomask.

Another significant patent is the "Compact multiple diameters wafer handling system with on-chuck wafer calibration and integrated cassette-chuck transfer." This compact device, with a footprint of approximately 33 by 34 inches, includes a five-axis wafer handling system and a quick exchange chuck for different wafer diameters. The system is designed to handle wafers ranging from six to twelve inches in diameter, providing on-chuck calibration through a fixed through beam sensor.

Career Highlights

Marc T Aho is currently employed at N&K Technology, Inc., where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the efficiency and accuracy of wafer testing and photomask handling.

Collaborations

Throughout his career, Marc has collaborated with notable colleagues, including Abdul Rahim Forouhi and Thaddeus J Wilson. These collaborations have contributed to the development of cutting-edge technologies in their respective fields.

Conclusion

Marc T Aho's contributions to technology through his patents and innovations have significantly impacted the industry. His work continues to pave the way for advancements in photomask and wafer handling systems.

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