Company Filing History:
Years Active: 2019-2021
Title: Manuel Mueller: Innovator in Millisecond Anneal Systems
Introduction
Manuel Mueller is a notable inventor based in Neu-Ulm, Germany. He has made significant contributions to the field of semiconductor technology, particularly in millisecond anneal systems. With a total of 2 patents to his name, his work focuses on enhancing the efficiency and reliability of these systems.
Latest Patents
One of Manuel's latest patents is titled "Chamber wall heating for a millisecond anneal system." This invention provides systems and methods for reducing contamination on reflective mirrors disposed on chamber walls in a millisecond anneal system. In one implementation, the reflective mirrors can be heated using various methods, including heating the fluid in a closed fluid system, utilizing electrical cartridge heaters or heater ribbons attached to the mirrors, and employing lamp light inside the chamber.
Another significant patent is "Fluid leakage detection for a millisecond anneal system." This invention outlines systems and methods for detecting fluid leaks associated with fluid-cooled components in a millisecond anneal system. The system includes a processing chamber with fluid-cooled components and a gas flow system that facilitates the flow of process gas. A vapor sensor is integrated to measure vapor in the process gas, enabling the detection of fluid leaks.
Career Highlights
Throughout his career, Manuel has worked with prominent companies in the semiconductor industry, including Mattson Technology, Inc. and Beijing E-town Semiconductor Technology Co., Ltd. His experience in these organizations has contributed to his expertise in developing innovative solutions for semiconductor processing.
Collaborations
Manuel has collaborated with several professionals in his field, including Dieter Hezler and Joachim Janisch. These collaborations have fostered a productive environment for innovation and development in semiconductor technologies.
Conclusion
Manuel Mueller is a distinguished inventor whose work in millisecond anneal systems has led to significant advancements in semiconductor technology. His patents reflect his commitment to improving system efficiency and reliability. His contributions continue to influence the industry positively.