The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 23, 2019
Filed:
Dec. 13, 2016
Applicant:
Mattson Technology, Inc., Fremont, CA (US);
Inventors:
Manuel Mueller, Neu-Ulm, DE;
Dieter Hezler, Lonsee-Halzhause, DE;
Assignee:
Mattson Technology, Inc., Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 3/20 (2006.01); G01N 33/00 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01M 3/20 (2013.01); G01N 33/0036 (2013.01); H01L 21/6719 (2013.01); H01L 21/67288 (2013.01);
Abstract
Systems and methods for detecting a fluid leak associated with fluid cooled components in a millisecond anneal system are provided. In one example implementation, a millisecond anneal system can include a processing chamber having one or more fluid cooled components. The system can include a gas flow system configured to provide for the flow of process gas in the processing chamber. The system can include a vapor sensor configured to measure vapor in process gas flowing through the gas flow system for detecting a fluid leak associated with the one or more fluid cooled components.