Makoto Nagano

Title: Makoto Nagano: Innovator in Semiconductor Technology

Introduction

Makoto Nagano is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on improving manufacturing methods and testing circuits for USB devices.

Latest Patents

One of Nagano's latest patents is a manufacturing method for semiconductor integrated circuit devices. This invention addresses the formation process of a semi-global interconnect in a Cu damascene multilayer wiring structure. The common practice involves removing an etch stop insulating film from a via bottom by dry etching, followed by nitrogen plasma treatment to reduce carbon deposits. However, his research revealed that a Cu hollow can be generated on the via bottom when a sequence of discharging for electrostatic charge removal is performed. His innovative method includes dry etching treatment of the via-bottom etch stop film, followed by nitrogen plasma treatment and argon plasma for electrostatic charge removal.

Another notable patent is a circuit for testing a USB device using a packet to be measured controlled by test signals. This USB test circuit is designed for use in devices such as system LSIs with USB functions. It generates and outputs a packet for signal quality testing, significantly reducing test time by focusing only on the packets that need to be measured.

Career Highlights

Throughout his career, Makoto Nagano has worked with several notable companies, including Oki Electric Industry Co., Ltd. and Renesas Electronics Corporation. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.

Collaborations

Nagano has collaborated with esteemed colleagues such as Katsunobu Hori and Kiyotake Togo. Their combined expertise has contributed to advancements in the field of semiconductor manufacturing and testing.

Conclusion

Makoto Nagano is a distinguished inventor whose work in semiconductor technology has led to several important patents. His innovative approaches to manufacturing methods and testing circuits continue to influence the industry.