Location History:
- Yokohami, JP (1988)
- Yokohama, JP (1987 - 1998)
Company Filing History:
Years Active: 1987-1998
Title: **Innovative Contributions of Makoto Higomura in Semiconductor Manufacturing**
Introduction
Makoto Higomura, an accomplished inventor based in Yokohama, Japan, has made significant advancements in the field of semiconductor device manufacturing. With a total of 9 patents to his name, his recent innovations focus on enhancing the precision of exposure apparatuses utilized in the production of semiconductor devices.
Latest Patents
Higomura's latest patents include the "Alignment apparatus and SOR X-ray exposure apparatus having same." This inventive technology employs a synchrotron radiation source to generate a synchrotron radiation beam, facilitating high-precision exposure of semiconductor wafers. The apparatus features an exposure unit with a mask stage for holding a mask and a wafer stage for supporting a wafer. It includes essential components such as a beam port, mirror unit, pre-alignment system, fine-alignment system, and apparatuses for mask and wafer storage and conveyance. These enhancements contribute to the production of highly integrated semiconductor devices by ensuring accurate alignment and exposure processes.
Career Highlights
Higomura is currently affiliated with Canon Kabushiki Kaisha, a renowned leader in imaging and optical products. His work at Canon emphasizes the development of advanced imaging technologies that push the boundaries of semiconductor manufacturing. His inventive contributions have positioned him as a key player in the technology of the future.
Collaborations
Throughout his career, Makoto Higomura has collaborated with notable colleagues, including Takao Kariya and Koichi Matsushita. Together, they have worked on pivotal projects that highlight their collective expertise in the pursuit of innovation within the semiconductor technology landscape.
Conclusion
Makoto Higomura's impactful work continues to shape the field of semiconductor manufacturing through his innovative patents and collaborative efforts. His inventions not only demonstrate the potential for advanced technologies but also pave the way for future developments in the industry, solidifying his legacy as a prominent figure in the realm of inventions.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.