Company Filing History:
Years Active: 2004-2015
Title: Lothar Bauch: Innovator in Semiconductor Technology
Introduction
Lothar Bauch is a prominent inventor based in Dresden, Germany. He has made significant contributions to the field of semiconductor technology, holding a total of 6 patents. His work focuses on improving measurement techniques and systems in semiconductor devices, particularly in the evaluation of overlap areas.
Latest Patents
One of Lothar Bauch's latest patents is a method and system for determining overlap process windows in semiconductors by inspection techniques. The formation of overlap areas in sophisticated semiconductor devices is a critical aspect that may not be efficiently evaluated using conventional measurement and design strategies. This patent provides innovative measurement techniques and systems where overlying device patterns are transformed into the same material layer, forming a combined pattern accessible by well-established defect inspection techniques. By geometrically modulating some of these combined patterns, a systematic evaluation of overlap process windows can be accomplished.
Career Highlights
Throughout his career, Lothar Bauch has worked with leading companies in the semiconductor industry, including Infineon Technologies AG and GlobalFoundries Inc. His expertise in semiconductor technology has allowed him to contribute to various projects that enhance the efficiency and effectiveness of semiconductor devices.
Collaborations
Lothar Bauch has collaborated with notable professionals in the field, including Helmut Wurzer and Thomas Zell. These collaborations have further enriched his work and contributed to advancements in semiconductor technology.
Conclusion
Lothar Bauch's innovative contributions to semiconductor technology, particularly through his patents and collaborations, highlight his role as a key figure in the industry. His work continues to influence the development of more efficient semiconductor devices.