Company Filing History:
Years Active: 2016-2020
Title: Liu Bo-Tsun: Innovator in Semiconductor Technology
Introduction
Liu Bo-Tsun is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the generation of extreme ultraviolet radiation and defect detection in wafers.
Latest Patents
Liu Bo-Tsun holds 2 patents that showcase his innovative approach to semiconductor fabrication. His first patent is for an "Apparatus and method for generating extreme ultraviolet radiation." This invention includes a droplet generator that produces target droplets, which are then heated by an excitation laser to create plasma. An energy detector measures the variations in EUV energy generated during this process, while a feedback controller adjusts the parameters of the droplet generator and excitation laser based on the detected energy variations.
His second patent focuses on "Detection of defects on wafer during semiconductor fabrication." This patent outlines systems and techniques for identifying defects on a wafer using non-correctable error data obtained from a scan. The data is reconstructed to create a non-correctable error image map, which is then transformed to generate a projection. This projection is compared to a set of rules to identify signatures indicative of defects.
Career Highlights
Liu Bo-Tsun is currently employed at Taiwan Semiconductor Manufacturing Company Limited, where he continues to push the boundaries of semiconductor technology. His work has been instrumental in enhancing the efficiency and accuracy of semiconductor fabrication processes.
Collaborations
Liu collaborates with talented individuals in his field, including Chun-Hsien Lin and Chin-Ti Ko, who contribute to his innovative projects and research endeavors.
Conclusion
Liu Bo-Tsun's contributions to semiconductor technology through his patents and work at Taiwan Semiconductor Manufacturing Company Limited highlight his role as a key innovator in the industry. His inventions are paving the way for advancements in semiconductor fabrication and defect detection.