Fremont, CA, United States of America

Lin Zhao

USPTO Granted Patents = 5 

Average Co-Inventor Count = 6.1

ph-index = 3

Forward Citations = 47(Granted Patents)


Company Filing History:


Years Active: 2018-2021

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5 patents (USPTO):

Title: Innovations by Inventor Lin Zhao

Introduction

Lin Zhao, an accomplished inventor based in Fremont, CA, has made significant contributions to the field of semiconductor processing. With a total of five patents to his name, Zhao's work focuses on innovative systems and methods that enhance the efficiency of plasma chambers, crucial for various processes in semiconductor manufacturing.

Latest Patents

Among Lin Zhao's latest patents, the first one details "Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators." This patent describes methods of providing RF signals to both main and edge electrodes within a plasma chamber to fine-tune the operation based on measured variables. This innovation aims to enhance the functionality and precision of semiconductor production.

Another notable patent is for "Silicon-based deposition for semiconductor processing." This method outlines a comprehensive process for forming a deposition over a substrate in a processing chamber. By flowing silicon-containing and COS-containing gases into the chamber and forming plasma, this approach ensures optimal deposition on substrates critical in semiconductor applications.

Career Highlights

Lin Zhao is currently affiliated with Lam Research Corporation, a key player in the semiconductor equipment industry. His contributions to the company have significantly advanced the technologies used in semiconductor manufacturing, showcasing his expertise in this highly specialized field.

Collaborations

Throughout his career, Zhao has collaborated with esteemed colleagues, including Alexei Marakhtanov and Felix Leib Kozakevich. These collaborations highlight the collective effort and teamwork involved in advancing innovative technologies that benefit the semiconductor industry.

Conclusion

Lin Zhao's inventive spirit and dedication to innovation have led to groundbreaking advancements in semiconductor processing. With five patents under his belt, his work continues to shape the future of technology in this essential industry.

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