Company Filing History:
Years Active: 2009-2018
Title: The Innovative Contributions of Lily Zheng
Introduction
Lily Zheng is a prominent inventor based in Fremont, CA (US). She has made significant contributions to the field of silicon fabrication, holding a total of 3 patents. Her work focuses on advanced methods for etching silicon structures, which are crucial in various technological applications.
Latest Patents
Lily Zheng's latest patents include a method for the fabrication of a silicon structure and deep silicon etch with profile control. This innovative method involves etching features into a silicon layer using a steady-state gas flow. The etch gas comprises an oxygen-containing gas and a fluorine-containing gas, which is then transformed into plasma. After the plasma is generated, the flow of the etch gas is subsequently stopped, allowing for precise control over the etching process.
Career Highlights
Lily Zheng is currently employed at Lam Research Corporation, a leading company in the semiconductor industry. Her expertise in silicon etching techniques has positioned her as a valuable asset to her team and the company as a whole.
Collaborations
Some of her notable coworkers include Robert P Chebi and Frank Lin, who collaborate with her on various projects within the company.
Conclusion
Lily Zheng's innovative work in silicon fabrication and etching techniques has made her a key figure in the field. Her contributions continue to advance technology and improve processes in semiconductor manufacturing.
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