Average Co-Inventor Count = 7.72
ph-index = 2
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Lam Research Corporation (3 from 3,768 patents)
3 patents:
1. 9865472 - Fabrication of a silicon structure and deep silicon etch with profile control
2. 9330926 - Fabrication of a silicon structure and deep silicon etch with profile control
3. 7534363 - Method for providing uniform removal of organic material