Company Filing History:
Years Active: 2022-2025
Title: Lifu Li - Innovator in Substrate Processing Technology
Introduction
Lifu Li is a prominent inventor based in Miyagi, Japan, known for his contributions to substrate processing technology. With a total of 7 patents to his name, he has made significant advancements in the field, particularly in the design and functionality of processing apparatuses.
Latest Patents
Among his latest innovations is a substrate processing apparatus that features a substrate support within a chamber, a shutter with a valve body for opening and closing the chamber's opening, and a baffle plate that includes a vertically inclined portion. This design ensures that when the shutter is closed, contact is maintained between the substrate support and a conductive elastic contact member. Another notable patent is an upper electrode assembly used in plasma processing apparatuses, which consists of an electrode plate, a metal plate, and a heat transfer sheet with vertically oriented graphene structures. These innovations reflect Lifu Li's commitment to enhancing substrate processing efficiency and effectiveness.
Career Highlights
Lifu Li is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work focuses on developing advanced technologies that improve substrate processing methods, contributing to the overall progress in semiconductor fabrication.
Collaborations
Lifu Li has collaborated with notable colleagues, including Hiroshi Tsujimoto and Takaki Kobune, who share his passion for innovation in the field of substrate processing technology.
Conclusion
Lifu Li's contributions to substrate processing technology through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in semiconductor manufacturing, showcasing the importance of innovation in this critical field.