Li-Min Chen

Title: The Innovative Contributions of Inventor Li-Min Chen in Optical Fiber Technology

Introduction

Li-Min Chen, based in San Jose, California, is a celebrated inventor known for her pioneering work in optical fiber technology. With two patents to her name, she has made significant advances in laser-enhanced voltage contrast and vacuum-compatible substrate thermal management. Her contributions have the potential to transform processes within various technological realms.

Latest Patents

Li-Min Chen’s latest patents showcase her ingenuity and technical expertise. The first patent, titled "Delivery of light into a vacuum chamber using an optical fiber," details a system that enhances the delivery of laser light into a vacuum chamber. This system includes a vacuum chamber equipped with a stage for securing a wafer. A laser light source outside the chamber directs light through an optical fiber, which transmits all wavelengths of light into the vacuum chamber, thereby advancing applications in semiconductor manufacturing and scientific research.

The second patent, "Apparatus and methods for vacuum-compatible substrate thermal management," outlines an innovative apparatus that manages substrate thermal properties in vacuum conditions. It consists of a load-lock chamber that holds a substrate before transfer into the vacuum chamber. The apparatus features a light-emitting diode array to heat the substrate while it is still in the load-lock chamber, effectively optimizing the substrate preparation process before testing or processing.

Career Highlights

Throughout her career, Li-Min has worked at notable companies, including KLA Corporation and KLA-Tencor Corporation. Her roles in these organizations have allowed her to collaborate with leading experts in the field, enhancing her understanding and pushing the boundaries of innovation.

Collaborations

Li-Min has collaborated with brilliant coworkers such as Emanuel Saerchen and Donald Pettibone, sharing insights and driving technological advancements in her field. These collaborations have played a significant role in her success as an inventor and have fostered a culture of innovation within her teams.

Conclusion

Li-Min Chen has established herself as a formidable force in the field of optical fiber technology through her innovative patents and impactful collaborations. Her work not only contributes to the advancement of technology but also provides a foundation for future research and development in similar areas. As she continues to contribute to the world of inventions, the impact of her innovations will surely resonate in various technological domains.