Kla Tencor Corporation

Kla Corporation

Li-Min Chen

Donald Pettibone

Oscar G Florendo

Emanuel Saerchen

Martin Brutsch

Jason Keith Rowan

Roni Robinzon

Christopher Vreje Ohanian

A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.

Delivery of light into a vacuum chamber using an optical fiber

One embodiment relates to an apparatus for vacuum-compatible substrate thermal management. The apparatus includes a load-lock chamber coupled to a vacuum chamber, a light-emitting diode array, and a substrate stage. The load-lock chamber is configured to hold a substrate prior to the substrate being transferred into the vacuum chamber, and a substrate stage is configured to hold the substrate in the vacuum chamber. The light-emitting diode array is configured to warm the substrate while the substrate is in the load-lock chamber. Other features, aspects and embodiments are also disclosed.

Apparatus and methods for vacuum-compatible substrate thermal management

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San Jose, CA, United States of America

Li-Min Chen