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Fremont, CA, United States of America

Li Diao

USPTO Granted Patents = 4

Average Co-Inventor Count = 3.7

ph-index = 2

Forward Citations = 7(Granted Patents)

Company Filing History:

Mattson Technology, Inc

Beijing E-town Semiconductor Technology, Co., Ltd

where one patent can have more than one assignee

Years Active: 2012-2021

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4 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11107693 - Method for high aspect ratio photoresist removal in pure reducing plasma (2021-08-31),

2. 10431469 - Method for high aspect ratio photoresist removal in pure reducing plasma (2019-10-01),

3. 9396963 - Mask removal process strategy for vertical NAND device (2016-07-19),

4. 8093157 - Advanced processing technique and system for preserving tungsten in a device structure (2012-01-10),

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