This inventor holds 2 USPTO granted patents. Top assignee: Taiwan Semiconductor Manufacturing Comp. Ltd.. Active years: 2019.
Company Filing History:
Years Active: 2019
Title: Innovations of Li-Chih Lu in Semiconductor Manufacturing
Introduction
Li-Chih Lu is a prominent inventor based in Taichung, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, holding 2 patents that showcase his innovative approaches to processing substrates and fabricating photomasks.
Latest Patents
One of his latest patents is titled "Method and system for processing substrate by chemical solution in semiconductor manufacturing fabrication." This method involves supplying a first flow of a chemical solution into a processing chamber designed for substrate processing. It includes producing a first thermal image of the chemical solution flow and performing image analysis on this thermal image. The substrate is then moved into the processing chamber based on the analysis results, ensuring that they fall within an allowable deviation from the baseline.
Another notable patent is "Mask blank and fabrication method thereof, and method of fabricating photomask." This invention outlines a method for fabricating a photomask, which includes providing a mask blank and removing a portion of the resist layer to create a patterned resist layer. The process further involves patterning the cooling layer and opaque layer, followed by the removal of the patterned resist layer and cooling layer. The mask blank consists of a light-transmitting substrate with an opaque layer, a cooling layer, and a resist layer stacked sequentially, with specific thermal conductivity and atomic number properties.
Career Highlights
Li-Chih Lu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on enhancing manufacturing processes and improving the efficiency of semiconductor fabrication.
Collaborations
Li-Chih has collaborated with notable colleagues, including Shao-Chi Wei and Sheng-Chang Hsu, who contribute to the innovative environment at their workplace.
Conclusion
Li-Chih Lu's contributions to semiconductor manufacturing through his patents reflect his commitment to innovation in the field. His work continues to influence the industry and pave the way for future advancements.