Leo D Yau

Title: Innovations by Leo D Yau

Introduction

Leo D Yau is a prominent inventor based in Durham, Oregon, known for his contributions to semiconductor technology. He holds a total of 3 patents that showcase his innovative approach to solving complex engineering challenges. His work primarily focuses on enhancing the efficiency and effectiveness of semiconductor processes.

Latest Patents

One of his latest patents is for a composite polishing pad designed for semiconductor processes. This improved composite polishing pad features a first layer of elastic material, a second, stiff layer, and a third layer optimized for slurry transport. The third layer is the one that makes contact with the wafer during the polishing process. The second layer is segmented into individual sections that are physically isolated from one another in the lateral dimension. Each segmented section is resilient across its width and cushioned by the first layer in the vertical direction. This unique design creates a 'bedspring' effect, allowing the pad to conform to longitudinal gradations across the wafer.

Another significant patent involves a CMOS process for fabricating integrated circuits, particularly dynamic memory cells. This process is particularly suited for forming dynamic memory cells within an n-well. A single plate member made from a first layer of polysilicon is utilized for the entire array. The unique etching of the first polysilicon layer prevents stringers from occurring when the second layer of polysilicon is deposited. Additionally, a tri-layer dielectric is employed for the capacitors in the array, and novel 'rear-end' processing is disclosed using phosphorus-doped glass.

Career Highlights

Leo D Yau is currently employed at Intel Corporation, where he continues to push the boundaries of semiconductor technology. His work has significantly impacted the efficiency of semiconductor manufacturing processes, making him a valuable asset to his team and the industry.

Collaborations

Throughout his career, Leo has collaborated with notable colleagues, including Mark T Bohr and Ken K Yu. These collaborations have further enriched his work and contributed to the advancement of semiconductor technologies.

Conclusion

Leo D Yau's innovative patents and contributions to semiconductor technology highlight his expertise and commitment to advancing the field. His work continues to influence the industry, making significant strides in the efficiency of semiconductor processes.