This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignees: Taiwan Semiconductor Manufacturing Comp. Ltd., TSMC China Company Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:

Years Active: 2026
Title: Lei Xu and Semiconductor Fabrication Process Innovation.
Introduction
Lei Xu is an inventor based in City, China. His work includes a patent concerning the monitoring and control of pump operations in semiconductor fabrication.
Latest Patents
Xu is associated with 1 patent, titled “System and Method for Semiconductor Fabricating Process.” The invention describes using two pump apparatuses to control pressure in separate chambers. Because the pumps produce operational data in different digital protocol formats, a box device receives and decodes both data streams. It then checks whether the first pump’s data falls within an acceptable range and adjusts that pump to bring its operation within the range.
Career Highlights
The provided career information associates Xu with Taiwan Semiconductor Manufacturing Company Limited and TSMC China Company Limited. His patent addresses equipment monitoring and pressure control in semiconductor manufacturing.
Collaborations
Xu’s listed coworkers include Yukai Hou and Fangbo Guo.
Conclusion
Lei Xu’s patent focuses on integrating data from pumps that use different digital protocols to support pressure monitoring and adjustment in semiconductor fabrication.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile