Lei Tian

Title: Lei Tian: Innovator in Optical Technologies

Introduction

Lei Tian is a prominent inventor based in Newton, MA, known for his contributions to optical technologies. He holds three patents that showcase his innovative approach to microscopy and substrate inspection. His work has significant implications for the fields of imaging and semiconductor manufacturing.

Latest Patents

One of Lei Tian's latest patents is titled "Bond-selective intensity diffraction tomography and uses thereof." This invention features a microscope that utilizes a pump laser to provide initial illumination to a sample. Additionally, a laser array offers a second illumination, with multiple laser elements delivering oblique illuminations. An illumination collecting source captures both illuminations, allowing for the observation of transient 3D refractive index variations in the sample.

Another notable patent is the "Substrate inspection apparatus and substrate inspection method." This apparatus includes a light irradiator with an objective lens and several optical fibers. The objective lens is designed to irradiate light onto a semiconductor substrate with multiple circuit pattern layers. The optical fibers are positioned around the objective lens to illuminate the peripheral area adjacent to the illumination area. A light generator adjusts the irradiation angle to selectively direct light, while a light analyzer captures images of the circuit pattern layers and measures overlay accuracy.

Career Highlights

Throughout his career, Lei Tian has worked with esteemed organizations such as Boston University and Samsung Electronics Co., Ltd. His experience in these institutions has allowed him to develop cutting-edge technologies that advance the field of optics.

Collaborations

Lei Tian has collaborated with notable colleagues, including Ji-Xin Cheng and Jian Zhao. Their combined expertise has contributed to the success of various projects and innovations in optical technologies.

Conclusion

In summary, Lei Tian is a distinguished inventor whose work in optical technologies has led to significant advancements in microscopy and substrate inspection. His patents reflect a commitment to innovation and excellence in the field.