Beaverton, OR, United States of America

Lee Peng Chua

USPTO Granted Patents = 26 

Average Co-Inventor Count = 4.5

ph-index = 6

Forward Citations = 124(Granted Patents)


Company Filing History:


Years Active: 2012-2025

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26 patents (USPTO):

Title: Innovations and Contributions of Lee Peng Chua

Introduction: Lee Peng Chua is a prominent inventor based in Beaverton, Oregon, known for his significant contributions to the field of semiconductor technology. With an impressive portfolio of 25 patents, he has pushed the boundaries of innovation in electroplating and manufacturing processes.

Latest Patents: Among his latest patents are two notable inventions. The first, titled "Wafer Shielding for Prevention of Lipseal Plate-Out," addresses the issue of undesired metal deposition on lipseals during the electrodeposition of metals on semiconductor substrates. This invention minimizes or eliminates ionic current directed at the lipseal by employing selective shielding during the electroplating process. By strategically using lipseals of different inner diameters, his method effectively suppresses electrodeposition near the lipseal, ensuring greater precision during metal deposition.

The second patent, "Cross Flow Conduit for Foaming Prevention in High Convection Plating Cells," presents a novel approach to managing fluid flow in electroplating cells. This invention utilizes a cross flow conduit that diverts fluid from the substrate region to a re-circulation containment unit, preventing issues associated with foaming during the plating process. The design includes options for integrating channels into plating components or using attachable devices that enhance flow management during electroplating.

Career Highlights: Lee Peng Chua has worked with leading technology companies such as Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has not only refined his technical skills but has also contributed to his reputation as an expert in the semiconductor field.

Collaborations: Throughout his career, Lee has collaborated with notable colleagues, including Steven T. Mayer and Thomas Anand Ponnuswamy. These partnerships have resulted in advancements in technology and a sharing of innovative ideas that benefit the industry.

Conclusion: Lee Peng Chua exemplifies the spirit of innovation in the semiconductor industry through his extensive patent portfolio and impactful collaborations. His inventions continue to advance manufacturing techniques, positioning him as a significant figure in the ongoing evolution of technology.

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