Company Filing History:
Years Active: 2017-2025
Title: The Innovations of Kyohyeok Kim: A Look at His Contributions to Plasma Etching
Introduction
Kyohyeok Kim, an accomplished inventor based in Seoul, South Korea, has made significant contributions to the field of electronics through his innovations. With a total of six patents to his name, his work primarily focuses on advanced plasma etching technology. This article will explore his latest patents, career highlights, collaborations, and the impact of his innovations.
Latest Patents
Kyohyeok Kim's most notable patents include an apparatus and method for plasma etching. This invention features an electrostatic chuck consisting of a base layer, a bonding layer, and an adsorption layer with numerous protrusions designed to contact the lower surface of a substrate. The apparatus also includes an edge ring that surrounds the substrate's lateral surface, alongside multiple coolant suppliers that inject coolant between the protrusions. Furthermore, the invention employs pipes supplying coolant, allowing for circulation in a specified direction, and a cooling device where the etching process undergoes first and second operational phases. During these phases, the temperature of the electrostatic chuck is controlled by a valve to determine the circulation direction of the coolant, enhancing the efficiency of the etching process.
Career Highlights
Kyohyeok Kim currently works at Samsung Electronics Co., Ltd., a leading technology company known for its innovations in electronics. His role as an inventor has allowed him to contribute significantly to the development of technologies that are crucial in the manufacturing of electronic components. His ingenuity in plasma etching technologies has positioned him as a valuable asset within the company.
Collaborations
Throughout his career, Kyohyeok Kim has collaborated with esteemed colleagues such as Jongwoo Sun and Jewoo Han. Their joint efforts demonstrate the power of teamwork in fostering innovation and addressing complex technological challenges within the field of electronics.
Conclusion
Kyohyeok Kim’s contributions to plasma etching technology underscore his importance as an inventor in the realm of electronics. His patents not only illustrate his innovative spirit but also highlight the collaborative nature of scientific advancement. As he continues to work at Samsung Electronics Co., Ltd., it will be exciting to see how his future innovations will shape the industry.