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For the Inventor, By the Inventor

Pittsburgh, PA, United States of America

Kyle S Lebouitz

This inventor holds 17 USPTO granted patents and 1 published patent application and 2 EPO patents. Top assignees: University of California, Xactix, Inc., Spts Technologies Limited. Active years: 1999-2018.

IDiyas Innovation Intelligence. (2026). Inventor Profile: Kyle S Lebouitz. Retrieved from https://idiyas.com/inventor/kyle-s-lebouitz

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

USPTO Granted Patents = 17 

% Patents Active = 94.1


Average Co-Inventor Count = 1.9

ph-index = 9

Forward Citations = 3,169(Granted Patents)


Location History:

  • Albany, CA (US) (1999 - 2002)
  • Pittsburgh, PA (US) (2002 - 2017)
  • Bethlehem, PA (US) (2018)

Company Filing History:

goldMedal6 out of 16,008 
 
University of California
 patents
silverMedal6 out of 6 
 
Xactix, Inc.
 patents
bronzeMedal3 out of 94 
 
Spts Technologies Limited
 patents
4. 2 out of 3 
 
Verimetra, Inc.
 patents

Years Active: 1999-2018

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17 patents (USPTO):Explore Patents
1. 10079150 - Method and apparatus for dry gas phase chemically etching a structure (2018-09-18),
2. 9576824 - Etching chamber with subchamber (2017-02-21),
3. 8703003 - Selective etching of semiconductor substrate(s) that preserves underlying dielectric layers (2014-04-22),
4. 8377253 - Pulsed etching cooling (2013-02-19),
5. 8257602 - Pulsed-continuous etching (2012-09-04),
6. 7638435 - Pulsed etching cooling (2009-12-29),
7. 6972199 - Method of making a cutting instrument having integrated sensors (2005-12-06),
8. 6887337 - Apparatus for etching semiconductor samples and a source for providing a gas by sublimation thereto (2005-05-03),
9. 6653239 - Thermal isolation using vertical structures (2003-11-25),
10. 6610235 - Method of fabricating epidermal abrasion device (2003-08-26),
11. 6566725 - Thermal isolation using vertical structures (2003-05-20),
12. 6494882 - Cutting instrument having integrated sensors (2002-12-17),
13. 6478974 - Microfabricated filter and shell constructed with a permeable membrane (2002-11-12),
14. 6187210 - Epidermal abrasion device with isotropically etched tips, and method of fabricating such a device (2001-02-13),
15. 5970998 - Microfabricated cantilever ratchet valve, and method for using same (1999-10-26),

Title: The Innovative Contributions of Kyle S. Lebouitz

Introduction

Kyle S. Lebouitz is a prominent inventor based in Pittsburgh, PA, known for his significant contributions to the field of semiconductor technology. With a total of 17 patents to his name, he has made remarkable advancements in methods and apparatuses for etching structures in semiconductor manufacturing.

Latest Patents

Among his latest patents is a method and apparatus for dry gas phase chemically etching a structure. This invention outlines a process that involves positioning a structure in an etch chamber, where the structure consists of a first material, such as silicon or tungsten, and a second material, like silicon dioxide. The method includes etching the first material using a noble gas fluoride or halogen fluoride gas phase chemical etchant while exposing the etch chamber to water vapor. Another notable patent involves an etching chamber with a subchamber designed for etching semiconductor wafers. In this apparatus, the semiconductor wafer is placed on a sample holder within a first chamber, while a second chamber encloses the combination, allowing for controlled gas evacuation and etching gas introduction.

Career Highlights

Kyle has worked with esteemed institutions such as the University of California and Xactix, Inc. His work has significantly impacted the semiconductor industry, particularly in the development of advanced etching techniques.

Collaborations

Throughout his career, Kyle has collaborated with notable individuals, including Albert P. Pisano and David L. Springer. These collaborations have further enhanced his innovative contributions to the field.

Conclusion

Kyle S. Lebouitz's work exemplifies the spirit of innovation in semiconductor technology. His patents and career achievements reflect a commitment to advancing the industry through cutting-edge research and development.

Profile summary based on public USPTO records.
Data Sources: USPTO Patent Grant XML, Patent Center, EPO & CIPO • Normalized by IDiyas Innovation Graph. Methodology & provenance architecturePlease report any incorrect information to [email protected]
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