Location History:
- Taipei, TW (2001)
- Hsing-Chu, TW (2002)
- Hsin-Chu, TW (2004 - 2005)
Company Filing History:
Years Active: 2001-2005
Title: Kuei-Jen Chang: Innovator in Semiconductor Technology
Introduction
Kuei-Jen Chang is a prominent inventor based in Hsin-Chu, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the development of methods that enhance the performance and reliability of electronic components. With a total of 4 patents to his name, Chang's work has had a lasting impact on the industry.
Latest Patents
One of his latest patents is titled "Method of forming tiny silicon nitride spacer for flash EPROM by fully wet etching technology." This innovative method addresses the challenges of 'write disturb' and unwanted reverse tunneling in split-gate flash EPROMs. By utilizing a fully wet etch technique, Chang has developed a process that allows for better control of the dimensions and shapes of silicon nitride spacers. The use of a phosphoric acid solution in combination with sulfuric acid and hydrogen peroxide significantly widens the process window, enabling more precise manufacturing.
Another notable patent is the "Method and apparatus for in-situ descum/hot bake/dry etch photoresist/polyimide layer." This invention allows for the sequential execution of descum, hot bake, and dry etch processes within a single process chamber. The method enhances efficiency by integrating multiple steps into one chamber, thereby streamlining the manufacturing process for semiconductor devices.
Career Highlights
Kuei-Jen Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at TSMC has positioned him as a key player in advancing semiconductor manufacturing technologies.
Collaborations
Chang has collaborated with several talented individuals in his field, including Yuan-Ko Hwang and Tsung-Chi Hsieh. These collaborations have fostered innovation and contributed to the successful development of new technologies.
Conclusion
Kuei-Jen Chang's contributions to semiconductor technology through his patents and work at TSMC highlight his role as an influential inventor. His innovative methods continue to shape the future of electronic components and manufacturing processes.