Kong Hean Lee

Title: Innovations by Kong Hean Lee

Introduction

Kong Hean Lee is a prominent inventor based in Singapore, known for his significant contributions to the field of semiconductor technology. With a total of 11 patents to his name, he has developed innovative methods that enhance the fabrication processes in integrated circuit devices.

Latest Patents

One of his latest patents is a method to form shallow trench isolations. This innovative approach involves creating a pad oxide layer over a semiconductor substrate, followed by the deposition of a silicon nitride layer. A protective layer is then added, and the layers are patterned to expose the substrate for trench formation. The etching process utilizes a large trench etching angle, ensuring that the protective layer prevents the loss of the silicon nitride layer during etching. The final steps include depositing a trench filling layer and polishing it to complete the shallow trench isolations.

Another notable patent is the shallow trench isolation using TEOS cap and polysilicon pullback. This method begins with the deposition of a silicon nitride layer over a semiconductor substrate, followed by a polysilicon layer and a TEOS layer. After performing mask and etch steps, the exposed side surfaces of the polysilicon layer are laterally moved. The process continues with etching to form a trench in the substrate, followed by the deposition of dielectric material that fills the trench and the openings. The substrate is then polished to create a planar surface with respect to the silicon nitride layer.

Career Highlights

Kong Hean Lee has worked with notable organizations such as Chartered Semiconductor Manufacturing Ltd and the National University of Singapore. His experience in these institutions has allowed him to refine his skills and contribute to advancements in semiconductor technology.

Collaborations

Throughout his career, Kong Hean Lee has collaborated with esteemed colleagues, including Eng Hua Lim and Chong Wee Lim. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Kong Hean Lee's contributions to semiconductor technology through his innovative patents have significantly impacted the industry. His work continues to inspire future advancements in integrated circuit fabrication.