Koji Sueoka

Title: The Innovations of Koji Sueoka

Introduction

Koji Sueoka is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the field of silicon wafer technology, holding a total of 3 patents. His work focuses on enhancing the performance and efficiency of silicon wafers used in electronic devices.

Latest Patents

One of his latest patents is for a high-resistance silicon wafer and its manufacturing method. This innovation ensures excellent gettering ability, mechanical strength, and economical efficiency while effectively preventing the generation of oxygen thermal donors during heat treatment. The process involves performing a heat treatment for forming an oxygen precipitate nucleus at temperatures between 500 to 900°C for over five hours in a non-oxidizing atmosphere. Additionally, a heat treatment for growing an oxygen precipitate is conducted at 950 to 1050°C for more than ten hours on a high-oxygen and carbon-doped high-resistance silicon wafer. This wafer exhibits a resistivity of 100 Ωcm or more, with controlled oxygen and carbon concentrations, resulting in a high-resistance, low-oxygen, and high-strength silicon wafer.

Another notable patent by Sueoka is related to the process for producing a high-resistance silicon wafer. This method also emphasizes excellent gettering ability and economical efficiency while preventing the generation of oxygen thermal donors. A high-temperature heat treatment at 1100°C or higher is performed on a carbon-doped high-resistance and high-oxygen silicon wafer, ensuring a remaining oxygen concentration of 6.5×10 atoms/cm or more.

Career Highlights

Throughout his career, Koji Sueoka has worked with notable companies such as Sumitomo Mitsubishi Silicon Corporation and Sumco Corporation. His experience in these organizations has contributed to his expertise in silicon wafer technology.

Collaborations

Some of his coworkers include Shinsuke Sadamitsu and Nobumitsu Takase, who have collaborated with him on various projects.

Conclusion

Koji Sueoka's innovations in silicon wafer technology have significantly impacted the electronics industry. His patents reflect a commitment to improving the performance and efficiency of silicon wafers, making him a notable figure in the field.