Koichiro Harada

Title: The Innovative Journey of Koichiro Harada

Introduction

Koichiro Harada, an esteemed inventor based in Toyama, Japan, has made significant contributions to the field of semiconductor devices and substrate processing technology. With a remarkable portfolio of 10 patents, Harada's innovative spirit has spurred advancements that greatly impact the semiconductor industry.

Latest Patents

Among his notable inventions, Harada's latest patents include a substrate processing apparatus and methods for manufacturing semiconductor devices. One of his inventions describes a plasma vessel designed to excite a process gas via plasma. This apparatus includes a substrate process chamber that communicates with the plasma vessel and a gas supply system that provides the process gas. A unique aspect of his design is the coil encircling the plasma vessel, which is powered by high-frequency electricity. This coil is positioned such that the distance between its inner periphery and that of the plasma vessel varies, optimizing the amplitude of the applied voltage's standing wave.

Additionally, his substrate processing apparatus features a substrate process chamber that houses a plasma generation space where the process gas is excited, along with a substrate support table elevating part and a controller. This innovative equipment allows for precise control over substrate positioning, enhancing its efficacy in semiconductor manufacturing.

Career Highlights

Harada's career is distinguished by his associations with leading companies in the industry. Noteworthy among them are Kokusai Electric Corporation and Hitachi Kokusai Electric Inc., where he honed his skills and contributed to pivotal projects in semiconductor technology.

Collaborations

Throughout his career, Harada has collaborated with talented individuals, including Takeshi Yasui and Masaki Murobayashi. These partnerships have led to fruitful exchanges of ideas and innovations, further enriching Harada's contributions to the field of technology.

Conclusion

Koichiro Harada stands as a pioneering inventor whose work continues to influence the semiconductor landscape. With his impressive array of patents and collaborative spirit, he embodies the essence of innovation that drives technological advancements forward. As the industry evolves, Harada's inventions will undoubtedly play a crucial role in shaping the future of semiconductor manufacturing.