San Jose, CA, United States of America

Kirby Hane Floyd

USPTO Granted Patents = 13 

Average Co-Inventor Count = 3.0

ph-index = 3

Forward Citations = 34(Granted Patents)


Company Filing History:


Years Active: 1995-2022

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13 patents (USPTO):

Title: **Kirby Hane Floyd: A Pioneer in Semiconductor Processing Innovations**

Introduction

Kirby Hane Floyd, based in San Jose, California, is a notable inventor with an impressive portfolio of 13 patents. His innovations primarily focus on advancements in semiconductor processing, particularly in the realm of thermal management within processing chambers. Kirby's work has significantly contributed to enhancing the efficiency and precision of chemical etching processes.

Latest Patents

One of his latest patents, titled **"Chamber apparatus for chemical etching of dielectric materials,"** showcases an improved pedestal heater designed for processing chambers. This invention features a temperature-controlled plate with an innovative structure that comprises an inner zone with a specific set of heating elements and an outer zone that is thermally managed by a continuous thermal choke. This design allows for a minimal temperature gradient, enabling precise control over the etching profile on substrate surfaces.

Another noteworthy patent, **"Methods and systems to improve pedestal temperature control,"** describes a semiconductor processing system that includes a substrate pedestal and a fluid channel configured to maintain precise temperature control. This system is enhanced by a temperature measurement device that communicates with a heater, allowing for effective thermal regulation during semiconductor processing.

Career Highlights

Throughout his illustrious career, Kirby Hane Floyd has made significant strides while working with industry-leading companies such as **Applied Materials, Inc.** and **FMC Corporation.** His roles in these organizations have allowed him to leverage his innovative ideas and translate them into practical applications that address the challenges faced in semiconductor manufacturing.

Collaborations

In his journey of innovation, Kirby has collaborated with proficient colleagues including Dmitry Lubomirsky and Adrian Q Montgomery. Their combined expertise has undoubtedly enhanced the development of cutting-edge technologies that push the boundaries of semiconductor processing.

Conclusion

Kirby Hane Floyd continues to be a pivotal figure in the field of semiconductor innovations, exemplifying how targeted inventions can lead to significant advancements in technology. His dedication to improving processes through innovative patent filings underscores the importance of intellectual property in fostering technological progress. As he continues to refine and expand upon his ideas, Kirby remains an inspiring example for aspiring inventors and engineers alike.

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