Company Filing History:
Years Active: 2010-2018
Title: Kevin Gerber: Innovator in Substrate Processing Technologies
Introduction
Kevin Gerber is a prominent inventor based in Portland, OR (US). He has made significant contributions to the field of substrate processing systems, holding a total of 4 patents. His innovative approaches have advanced the efficiency and effectiveness of processing chambers used in various applications.
Latest Patents
Among his latest patents is the "Rapid chamber clean using concurrent in-situ and remote plasma sources." This method involves cleaning a processing chamber by supplying nitrogen trifluoride (NF) gas to a remote plasma source, generating plasma, and utilizing both remote and in-situ plasma for effective cleaning. Another notable patent is the "Method and apparatus for purging and plasma suppression in a process chamber." This invention features a showerhead that delivers precursor gas to a processing chamber, incorporating a baffle made of dielectric material to enhance the process.
Career Highlights
Kevin Gerber has worked with leading companies in the industry, including Novellus Systems Incorporated and Lam Research Corporation. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking technologies in substrate processing.
Collaborations
Throughout his career, Kevin has collaborated with talented individuals such as Jon Henri and Xingyuan Tang. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.
Conclusion
Kevin Gerber's work in substrate processing technologies showcases his dedication to innovation and excellence. His patents reflect a commitment to improving industry standards and advancing technological capabilities.