Novellus Systems Incorporated

Lam Research Corporation

Kevin Gerber

Jon Henri

Arul N Dhas

Xingyuan Tang

Jason L Tian

Pramod Subramonium

Nagraj Shankar

Patrick G Breiling

Keith Fox

James Forest Lee

Jennifer O'Loughlin

Matthew Mudrow

Jonathan Church

A method for cleaning a processing chamber of a substrate processing system includes supplying nitrogen trifluoride (NF) gas to a remote plasma source (RPS); generating RPS plasma using the RPS; supplying the RPS plasma to the processing chamber; supplying NFgas as bypass gas to the processing chamber; striking in-situ plasma in the processing chamber while the RPS plasma is supplied; and cleaning the processing chamber during a cleaning period using both the RPS plasma and the in-situ plasma.

Rapid chamber clean using concurrent in-situ and remote plasma sources

A substrate processing system includes a showerhead that comprises a head portion and a stem portion and that delivers precursor gas to a processing chamber. A baffle includes a base portion having an outer diameter that is greater than an outer diameter of the head portion of the showerhead, that comprises a dielectric material and that is arranged between the head portion of the showerhead and an upper surface of the processing chamber.

Method and apparatus for purging and plasma suppression in a process chamber

This invention provides a high throughput PECVD process for depositing TEOS films in a multi-station sequential deposition chamber. The methods significantly reduce the number of particles in the TEOS films, thereby eliminating or minimizing small bin defects. The methods of the invention involve dedicating a first station for temperature soak while flowing purge gas. Stopping the flow of reactant gas and flowing the purge gas for stationeliminates TEOS condensation on a cold wafer surface and significantly reduces the number of defects in the film, particularly for short temperature soaks.

Method of eliminating small bin defects in high throughput TEOS films

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Portland, OR, United States of America

Kevin Gerber