Average Co-Inventor Count = 4.1
ph-index = 4
Forward Citations = 107(Granted Patents)
Location History:
- Kumamoto, JP (1994)
- Oonojo, JP (1994 - 1996)
Company Filing History:
Tokyo Electron Limited
Tokyo Electron Kyushu Limited
Tokyo Electron Saga Limited
where one patent can have more than one assignee
Years Active: 1994-1996
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4 patents (USPTO):Explore Patents
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