Kenji Noda

Title: Kenji Noda: Innovating Semiconductor Manufacturing

Introduction

Kenji Noda is a notable inventor based in Osaka, Japan, recognized for his contributions to the semiconductor industry. With a portfolio of four patents, Noda has made significant advancements in developing methods that enhance the efficiency and effectiveness of semiconductor devices.

Latest Patents

Noda's latest innovations include methods for both developing and manufacturing semiconductor devices. One of his patents focuses on a developing method that involves supplying a developer onto a resist film positioned on a substrate. This substrate, adorned with design patterns of varying mask opening ratios, undergoes a development reaction with the applied developer. Following this process, a unique rinsing solution is introduced while rotating the substrate, ensuring the removal of the dissolved developer and resist. Notably, the substrate's rotation speed during this removal step is strategically set to half or less than that during rinsing, optimizing the overall process.

Another of Noda's patented methods centers on a focus measurement technique crucial for semiconductor device manufacturing. This focuses on determining a focus value by observing the shrinkage of resist patterns resulting from electron beam irradiation, which hinges on the precise focus value. By measuring this shrinkage, Noda's method generates a focus value correlated with the shrinkage and establishes a focal shift length, distinguishing it from a predetermined optimal focus.

Career Highlights

Kenji Noda has honed his expertise through positions at prominent companies like Panasonic Corporation and Matsushita Electric Industrial Co., Ltd. These experiences have provided him with a robust foundation in the semiconductor field, enabling him to innovate and develop proficient methods for semiconductor fabrication.

Collaborations

Throughout his career, Noda has collaborated with distinguished colleagues such as Hidekazu Kitahara and Hirofumi Fukumoto. Their cooperation in various projects underscores the collaborative spirit that drives innovation in the technology sector.

Conclusion

Kenji Noda's contributions to semiconductor technology represent a significant leap forward in manufacturing processes. With his innovative approaches and a strong background in reputable organizations, Noda continues to inspire advancements in the semiconductor industry, showcasing the importance of inventors in driving technological progress.