Company Filing History:
Years Active: 2006-2016
Title: Kenichi Kuwabara: Innovator in Plasma Processing Technology
Introduction
Kenichi Kuwabara is a prominent inventor based in Hikari, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 7 patents. His work focuses on improving methods and apparatuses for plasma processing, which are essential in various industrial applications.
Latest Patents
One of Kuwabara's latest patents is a plasma processing method and apparatus designed for the processing of multiple substrates. This innovative apparatus includes a plasma processing chamber equipped with an antenna electrode and a lower electrode, which allows for the placement and retention of several substrates. The system features a gas feeder for introducing processing gas, a vacuum pump for gas discharge, and a solenoid coil for creating a magnetic field within the chamber. The process involves feeding RF power to the antenna electrode to generate plasma, with the operation being repeated until all substrates are processed. The end of the seasoning phase is determined by the stabilization of parameters, including the internal pressure of the chamber.
Career Highlights
Kuwabara is associated with Hitachi High-Technologies Corporation, where he continues to develop and refine plasma processing technologies. His expertise and innovative approach have positioned him as a key figure in the advancement of this field.
Collaborations
Throughout his career, Kuwabara has collaborated with notable colleagues, including Takeshi Shimada and Eiji Ikegami. These partnerships have contributed to the successful development of various technologies and patents.
Conclusion
Kenichi Kuwabara's contributions to plasma processing technology highlight his role as an influential inventor. His innovative methods and collaborative efforts continue to shape advancements in the industry.