Kofu, Japan

Keizo Hasebe


Average Co-Inventor Count = 4.4

ph-index = 11

Forward Citations = 813(Granted Patents)


Company Filing History:


Years Active: 1993-2003

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11 patents (USPTO):Explore Patents

Title: Keizo Hasebe: Innovator in Semiconductor Technology

Introduction

Keizo Hasebe is a prominent inventor based in Kofu, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 11 patents. His innovative work has advanced the methods used in film formation processes, which are crucial for semiconductor manufacturing.

Latest Patents

One of Hasebe's latest patents involves a film forming method and apparatus. In this invention, a solvent of a resist solution is dropped from a solvent supply nozzle onto the surface of a semiconductor wafer held by a spin chuck. The semiconductor wafer is then rotated by the spin chuck to spread the resist solution evenly across its surface. Simultaneously, the resist solution is dropped from a resist solution supply nozzle onto the wafer, following the solvent. During this process, the processing space is isolated from the outer atmosphere by closing a lid of a processing vessel, and a sprayed solvent is supplied into the processing space. This setup fills the processing space with a mist of solvent, which suppresses the evaporation of the solvent from the resist solution. As a result, a film of the resist solution is formed with a uniform thickness extending to the edge of the semiconductor wafer.

Career Highlights

Throughout his career, Keizo Hasebe has worked with notable companies in the semiconductor industry, including Tokyo Electron Limited and Tokyo Electron Kyushu Limited. His experience in these organizations has allowed him to refine his skills and contribute to groundbreaking advancements in semiconductor technology.

Collaborations

Hasebe has collaborated with esteemed colleagues such as Norio Semba and Hiroyuki Iino. Their combined expertise has fostered an environment of innovation and creativity in their projects.

Conclusion

Keizo Hasebe's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the industry and pave the way for future advancements.

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