Company Filing History:
Years Active: 2005
Title: A Closer Look at Inventor Keiichi Sugahara
Introduction
Keiichi Sugahara, an innovative inventor based in Hyogo, Japan, has made significant contributions to the field of plasma processing technology. His expertise and creativity in engineering have led to the development of a unique patent focused on enhancing process performance evaluations in plasma devices.
Latest Patents
Sugahara holds a patent for a "Plasma processing apparatus capable of evaluating process performance." This invention introduces a high-frequency current detector that identifies high-frequency currents generated when power is supplied to a chamber without producing plasma. By relaying this information to a computer, the system can assess the performance of the process by comparing the detected current to a predetermined reference current. If the currents align, it indicates normal operation; if not, the performance is flagged as abnormal. This innovation not only improves the accuracy of plasma processing assessments but also enhances the reliability of the apparatus.
Career Highlights
Keiichi Sugahara is currently employed at Renesas Technology Corp., where he is instrumental in advancing the technology behind semiconductor manufacturing and plasma processing. His dedication to research and development has positioned him as a valuable asset to the company's innovative initiatives.
Collaborations
Throughout his career, Sugahara has worked alongside esteemed colleagues such as Minoru Hanazaki and Toshihiko Noguchi. These collaborations have fostered a rich environment for idea exchange and have contributed to the successful development of technologies in their field.
Conclusion
Keiichi Sugahara is a remarkable inventor whose work in plasma processing technology exemplifies the impact of innovative thinking in engineering. His contributions not only enrich the knowledge base but also advance the capabilities of devices used in semiconductor manufacturing. With his continued efforts at Renesas Technology Corp., Sugahara is poised to make further advancements that could shape the industry for years to come.