Keiichi Enjoji

Title: Keiichi Enjoji: Innovator in Microstructure Inspection and Wafer Support Technology

Introduction

Keiichi Enjoji is a prominent inventor based in Tokyo, Japan. He has made significant contributions to the fields of microstructure inspection and wafer support technology. With a total of 2 patents, his work has advanced the capabilities of various technological applications.

Latest Patents

One of Keiichi Enjoji's latest patents is a device, method, and program for inspecting microstructure. This innovative speaker unit features multiple sound sources that output sound waves. The compressional sound waves produced by the speaker unit interact with a three-axis acceleration sensor, allowing for precise measurement of microstructure properties. The control unit analyzes the measurement data to determine the sensor's characteristics. Another notable patent is for a wafer supporter, which includes a base made of nickel and a thermally conductive member composed of silicone rubber blended with silver fine powder. This design ensures efficient cooling of the wafer without causing curvature or heat degradation during processing.

Career Highlights

Keiichi Enjoji is associated with Tokyo Electron Limited, a leading company in the semiconductor industry. His work at the company has been instrumental in developing advanced technologies that enhance manufacturing processes.

Collaborations

Throughout his career, Keiichi has collaborated with notable colleagues, including Toshiyuki Matsumoto and Naoki Ikeuchi. Their combined expertise has contributed to the success of various projects and innovations.

Conclusion

Keiichi Enjoji's contributions to microstructure inspection and wafer support technology highlight his role as a key innovator in the field. His patents reflect a commitment to advancing technology and improving manufacturing processes.