The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Mar. 02, 2006
Toshiyuki Matsumoto, Amagasaki, JP;
Naoki Ikeuchi, Amagasaki, JP;
Masami Yakabe, Amagasaki, JP;
Keiichi Enjoji, Tokyo, JP;
Masato Hayashi, Amagasaki, JP;
Toshiyuki Matsumoto, Amagasaki, JP;
Naoki Ikeuchi, Amagasaki, JP;
Masami Yakabe, Amagasaki, JP;
Keiichi Enjoji, Tokyo, JP;
Masato Hayashi, Amagasaki, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A speaker unit has a plurality of sound sources each outputting a sound wave. The compressional, sound wave output from the speaker unit arrives, or vibrates air, which moves a movable part of a three-axis acceleration sensor, or a microstructure of a chip to be tested TP. As the movable part thus moves, a value in resistance accordingly varies, and such variation is measured as based on an output voltage provided via a probe. A control unit determines a property of the three-axis acceleration sensor from a value in property as measured or measurement data. Furthermore, the plurality of sound sources can be spaced by a pitch of a predetermined value set as based on their difference in the distance to the movable part of the three-axis acceleration sensor and the wavelength of the test wave to apply a composite test wave to the movable part such that the composite sound wave's composite sound field is maximized.