This inventor holds 8 USPTO granted patents and 1 EPO patent. Top assignees: Ube Industries, Inc., National Institute of Advanced Industrial Science and Technology. Active years: 2005-2011.
Company Filing History:
8 out of 1,432 
1 out of 1,763 
Years Active: 2005-2011
Title: Keigo Nagao: Innovator in Piezoelectric Technology
Introduction
Keigo Nagao is a prominent inventor based in Ube, Japan, known for his significant contributions to the field of piezoelectric technology. With a total of 8 patents to his name, Nagao has made remarkable advancements that enhance the performance and efficiency of piezoelectric devices.
Latest Patents
One of his latest patents is a thin film piezoelectric resonator and method for manufacturing the same. This innovative resonator suppresses deterioration of impedance at antiresonant frequency and boasts a high Q value. The design includes a semiconductor substrate, an insulating layer in contact with the substrate, and a piezoelectric resonator stack that consists of a lower electrode, a piezoelectric layer, and an upper electrode. An oscillation space is formed where the lower and upper electrodes overlap in thickness. The manufacturing process involves forming the insulating layer in contact with the semiconductor substrate and performing heat treatment at 300°C or higher in a non-oxygenated atmosphere.
Another notable patent involves aluminum nitride thin film, a composite film containing the same, and a piezoelectric thin film resonator utilizing this technology. This resonator features a substrate and a piezoelectric layered structure, which includes a lower electrode, a piezoelectric aluminum nitride thin film with c-axis orientation, and an upper electrode. The lower electrode is made of a metal thin film that includes a layer with ruthenium as a major component, achieving a full-width half maximum (FWHM) of a rocking curve of a (0002) diffraction peak of 3.0° or less.
Career Highlights
Throughout his career, Keigo Nagao has worked with notable organizations such as Ube Industries, Inc. and the National Institute of Advanced Industrial Science and Technology. His work has significantly impacted the development of advanced materials and technologies in the field of piezoelectric devices.
Collaborations
Nagao has collaborated with esteemed colleagues, including Tetsuo Yamada and Chisen Hashimoto, contributing to the advancement of piezoelectric technology through shared expertise and innovative ideas.
Conclusion
Keigo Nagao's contributions to piezoelectric technology through his patents and collaborations highlight his role as a leading inventor in this field. His work continues to influence advancements in materials science and