The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 01, 2007
Filed:
Dec. 17, 2004
Keigo Nagao, Ube, JP;
Tetsuro Kunisawa, Ube, JP;
Tetsuo Yamada, Ube, JP;
UBE Industries, Ltd., Yamaguchi, JP;
Abstract
Method of producing a piezoelectric thin film device comprises a step of forming an insulating layer () capable of being etched by a specific chemical substance on the upper surface of a substrate (); a step of forming a sacrificial layer () made of a substance having a higher etching rate by the specific chemical substance than the insulating layer on a partial region of the insulating layer; a step of forming a lower electrode () on a region including the sacrificial layer; a step of forming the piezoelectric thin film () on a region including a part of the lower electrode; a step of forming an upper electrode () on a region including a part of the piezoelectric thin film; a step of forming via hole (), which penetrates the piezoelectric thin film and lower electrode, so as to expose a part of the sacrificial layer; and a step of forming a space () for oscillation by etching both the sacrificial layer and the insulating layer with the same specific chemical substance by introducing the specific chemical substance through the via hole.