This inventor holds 6 USPTO granted patents. Top assignees: Sumitomo Osaka Cement Co., Ltd., Tokyo Electron Limited. Active years: 2004-2021.
Location History:
- Narashino, JP (2004 - 2010)
- Ichikawa, JP (2009 - 2012)
- Chiyoda-ku, JP (2012)
- Tokyo, JP (2021)
Company Filing History:
6 out of 482 
2 out of 10,850 
Years Active: 2004-2021
Title: Keigo Maki: Innovator in Electrostatic Chuck Technology
Introduction
Keigo Maki is a prominent inventor based in Ichikawa, Japan, known for his contributions to the field of electrostatic chuck devices. With a total of six patents to his name, Maki has made significant advancements in technology that enhance the efficiency and functionality of electrostatic chucks used in various applications.
Latest Patents
Maki's latest patents include an innovative electrostatic chuck device featuring a focus ring. This device comprises a placing table with a surface for a plate-shaped sample, an electrostatic attraction electrode positioned beneath the table, and a focus ring that surrounds the table. The design allows for a lift pin that can raise the focus ring from the base part. Another notable patent is an electrostatic chuck device that includes a substrate with an electrostatic-adsorption inner electrode and a dielectric plate fixed to a metal base section. This design ensures effective adhesion and functionality through the use of insulating and conductive adhesive bonding layers.
Career Highlights
Throughout his career, Keigo Maki has worked with notable companies such as Sumitomo Osaka Cement Co., Ltd. and Tokyo Electron Limited. His experience in these organizations has contributed to his expertise in developing advanced electrostatic chuck technologies.
Collaborations
Maki has collaborated with esteemed colleagues, including Hiroshi Inazumachi and Mamoru Kosakai, to further enhance his innovative projects and patents.
Conclusion
Keigo Maki's work in the field of electrostatic chuck devices showcases his dedication to innovation and technology. His patents reflect a commitment to improving the efficiency of electrostatic systems, making him a significant figure in his field.