Company Filing History:
Years Active: 2024-2025
Title: Kedi Wu: Innovator in Tungsten Film Technology
Introduction
Kedi Wu is a notable inventor based in Fremont, California, recognized for his contributions to the field of electronic device manufacturing. With a total of two patents to his name, Wu has made significant advancements in tungsten film technology, which is crucial for the development of modern electronic devices.
Latest Patents
Wu's latest patents include a method of reducing titanium nitride etching during tungsten film formation. This innovative method involves forming a tungsten nucleation layer on a barrier layer using an atomic layer deposition (ALD) process that utilizes a tungsten precursor free of fluorine. The process parameters are carefully controlled to enhance the formation of the nucleation layer, which may also include a WSi pre-nucleation layer. Another significant patent focuses on fluorine-free tungsten ALD for dielectric selectivity improvement. This method describes the formation of metallic tungsten films selectively on conductive surfaces while avoiding deposition on dielectric surfaces. The substrate is initially exposed to a process condition that deposits a tungsten-containing film, which is then converted to a metallic tungsten film through a subsequent process condition.
Career Highlights
Kedi Wu is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display industries. His work at Applied Materials has positioned him as a key player in the development of advanced manufacturing techniques for electronic devices.
Collaborations
Wu collaborates with talented individuals in his field, including Chenfei Shen and Chi-Chou Lin, who contribute to the innovative environment at Applied Materials.
Conclusion
Kedi Wu's contributions to tungsten film technology and his innovative patents highlight his role as a significant inventor in the electronics industry. His work continues to influence the development of advanced electronic devices, showcasing the importance of innovation in technology.