Location History:
- Yamanshi, JP (2005)
- Nirasaki, JP (2007)
- Yamanashi, JP (2007)
- Miyagi, JP (2017)
Company Filing History:
Years Active: 2005-2025
Title: Kazuya Kato: Innovator in Plasma Processing Technology
Introduction
Kazuya Kato is a prominent inventor based in Yamanashi, Japan. He has made significant contributions to the field of plasma processing technology, holding a total of 5 patents. His innovative approaches have advanced methods for substrate cleaning and processing, showcasing his expertise in the industry.
Latest Patents
Kato's latest patents include a cleaning method and a plasma processing apparatus. The cleaning method involves providing a substrate with a low-k layer containing silicon to a substrate support. It etches the low-k layer using plasma generated from a first gas, separates the etched substrate from the support, and removes any reaction products attached to the substrate using plasma from a second gas. The second gas comprises a first carbon-containing gas represented by CHF(y≥0, x/z>¼). Additionally, his method of processing a target object can suppress surface roughness in both wiring and metal masks. This method generates plasma from a first processing gas containing a fluorocarbon gas and/or a hydrofluorocarbon gas to etch a diffusion barrier film until a copper wiring is exposed. It then generates plasma from a second processing gas containing a carbon-containing gas to form an organic film on the surface of the target object.
Career Highlights
Kazuya Kato is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work has been instrumental in developing advanced technologies that enhance the efficiency and effectiveness of plasma processing.
Collaborations
Kato has collaborated with notable colleagues, including Masahiro Ogasawara and Katsuhiko Ono. Their combined expertise has contributed to the success of various projects and innovations within the company.
Conclusion
Kazuya Kato's contributions to plasma processing technology and his innovative patents reflect his dedication to advancing the field. His work continues to influence the industry and pave the way for future developments.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.