Kumamoto-ken, Japan

Kazutoshi Yoshioka


Average Co-Inventor Count = 2.3

ph-index = 13

Forward Citations = 823(Granted Patents)


Location History:

  • Kamoto, JP (1994)
  • Kumamoto, JP (1989 - 1995)
  • Kumamoto-ken, JP (1999 - 2001)
  • Kumamto-ken, JP (2001)
  • Kamoto-gun, JP (2003)

Company Filing History:


Years Active: 1989-2003

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14 patents (USPTO):Explore Patents

Title: Kazutoshi Yoshioka: Innovations in Semiconductor Coating Technology

Introduction: Kazutoshi Yoshioka is a distinguished inventor based in Kumamoto-ken, Japan, known for his significant contributions to semiconductor technology. With a remarkable portfolio of 14 patents, Yoshioka has made strides in enhancing the processes involved in semiconductor wafer coating, pivotal to the electronics industry.

Latest Patents: Among his recent innovations, Yoshioka developed a coating apparatus that utilizes a unique method for applying resist solutions to semiconductor wafers. The apparatus operates by dropping a solvent of a resist solution from a supply nozzle onto the wafer’s surface, which is secured by a spin chuck. The wafer's rotation allows for even distribution of the resist solution. Notably, Yoshioka's system isolates the processing space from external atmosphere, curtailing evaporation and ensuring uniform film thickness across the entire wafer surface. His work emphasizes precision in processing, vital for consistent semiconductor performance.

Career Highlights: Kazutoshi Yoshioka has had a noteworthy career, particularly with industry leaders such as Tokyo Electron Limited and Tokyo Electron Kyushu Limited. These roles have afforded him the opportunity to refine his innovative techniques in semiconductor manufacturing and contribute significantly to advancing technology in this field.

Collaborations: Throughout his career, Yoshioka has collaborated with notable figures such as Masami Akimoto and Shuuichi Nishikido. Together, they have worked on various projects aimed at improving semiconductor processing techniques, fostering a collaborative environment that promotes innovation and efficiency.

Conclusion: Kazutoshi Yoshioka's work exemplifies the synergy between innovation and practical application in the semiconductor industry. His patents reflect a deep understanding of the challenges in coating technology and pave the way for future advancements. As he continues to develop new solutions, Yoshioka remains an influential figure in enhancing semiconductor manufacturing processes.

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