Nagano, Japan

Kazutaka Shibuya


 

Average Co-Inventor Count = 3.1

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2015-2025

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9 patents (USPTO):Explore Patents

Title: Kazutaka Shibuya: Innovator in Wafer Measurement and Polishing Technology

Introduction

Kazutaka Shibuya is a prominent inventor based in Nagano, Japan. He has made significant contributions to the field of wafer measurement and polishing technology. With a total of nine patents to his name, Shibuya's work has advanced the precision and efficiency of semiconductor manufacturing processes.

Latest Patents

One of Shibuya's latest patents is a non-contact apparatus for measuring wafer thickness. This innovative device includes a monolithic wavelength sweeping semiconductor laser light source, a laser control unit, and a processor that manages the oscillation of laser light. The optical system guides the laser light onto the wafer, while a detection unit captures the interference light signal of the reflected light. The A/D converter then transforms this signal into a digital format, allowing the calculation unit to determine the wafer's thickness through digital signal analysis.

Another notable patent is the work polishing head, which features a head main body, a carrier, a pressure chamber, and a fluid supplying section. This polishing head is designed with a linear motion guide that allows for axial movement without rotation, effectively transmitting rotational force to the carrier. The rotation transmitting plate supports the carrier and facilitates the transfer of rotational force, enhancing the polishing process.

Career Highlights

Kazutaka Shibuya has worked with esteemed organizations such as Fujikoshi Machinery Corporation and the Kanazawa Institute of Technology. His experience in these companies has allowed him to refine his skills and contribute to groundbreaking innovations in his field.

Collaborations

Shibuya has collaborated with notable colleagues, including Yoshio Nakamura and Takayuki Fuse. Their combined expertise has fostered advancements in technology and innovation.

Conclusion

Kazutaka Shibuya's contributions to wafer measurement and polishing technology have established him as a key figure in the semiconductor industry. His innovative patents and collaborative efforts continue to influence advancements in manufacturing processes.

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