The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 28, 2020

Filed:

Mar. 27, 2017
Applicant:

Fujikoshi Machinery Corp., Nagano, JP;

Inventors:

Kazutaka Shibuya, Nagano, JP;

Yoshio Nakamura, Nagano, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); B24B 57/02 (2006.01); B24B 37/04 (2012.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67219 (2013.01); B24B 37/04 (2013.01); B24B 57/02 (2013.01); H01J 37/3255 (2013.01); H01J 37/32568 (2013.01); H01L 21/6708 (2013.01); H01J 2237/334 (2013.01);
Abstract

A nozzle according to the invention includes a liquid flow passage through which a liquid flows, a gas flow passage through which a gas flows, the gas flow passage communicating with the liquid flow passage and feeding the gas to the liquid flow passage, and a plasma generating mechanism for generating plasma in the gas fed from the gas flow passage to the liquid flow passage, in which the plasma generating mechanism includes a first electrode provided so as to be exposed to an inside of the liquid flow passage, a second electrode provided so as not to be exposed to the inside of the liquid flow passage and so as to be exposed to an inside of the gas flow passage, and a power source for applying a predetermined voltage across the first electrode and the second electrode, and in which the liquid with which the gas including the generated plasma is mixed as bubbles having a predetermined diameter is spouted.


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