Company Filing History:
Years Active: 1987-2014
Title: Kazumasa Endo: Innovator in Defect Inspection Technology
Introduction
Kazumasa Endo is a prominent inventor based in Kawasaki, Japan. He has made significant contributions to the field of defect inspection technology, holding a total of 13 patents. His work focuses on improving the quality and efficiency of defect detection in various materials.
Latest Patents
One of his latest patents is titled "Polarized light defect detection in pupil images." This invention involves a defect inspecting apparatus that inspects defects on a sample with a patterned surface. The apparatus includes a stage for moving the sample, a light source, and an optical system that illuminates the sample surface through a polarizer and an objective lens. It also features a detecting optical system that captures a pupil image and a section that detects defects by comparing the obtained image with a stored reference. This technology allows for quick judgment of pattern conformity on substrates.
Another notable patent is the "Defect inspection device and defect inspection method." This device inspects defects on a substrate, such as a wafer, with a repeated pattern. It includes an illumination optical system that radiates light onto the pattern and a detection optical system that captures an image of the pupil plane produced by diffracted light. The detection section then identifies defects from the pupil image obtained, enhancing the efficiency of quality assessment.
Career Highlights
Kazumasa Endo has worked with notable companies in the field, including Nikon Corporation and Nippon Kogaku K.K. His experience in these organizations has contributed to his expertise in optical technologies and defect inspection methods.
Collaborations
Throughout his career, Endo has collaborated with esteemed colleagues such as Hitoshi Matsuzawa and Yutaka Suenaga. These partnerships have fostered innovation and advancements in the technologies he has developed.
Conclusion
Kazumasa Endo's contributions to defect inspection technology have significantly impacted the industry. His innovative patents and collaborations with leading companies and professionals highlight his role as a key figure in advancing optical inspection methods.