The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 19, 1988
Filed:
Aug. 21, 1987
Kazumasa Endo, Kawasaki, JP;
Yasuhisa Matsumoto, Kawasaki, JP;
Nippon Kogaku K.K., Tokyo, JP;
Abstract
A projection exposure apparatus on which are placed a reticle whose pattern is comprised of an area transmitting a radiation therethrough and an area not transmitting the radiation therethrough and a substrate includes a projection optical system for projecting the pattern formed on the reticle onto the substrate, the projection optical system being telecentric on the substrate side, a device producing a radiation beam for alignment of the reticle and the substrate, an alignment device for supplying the radiation beam onto the substrate through the reticle and the projection optical system and detecting the relative positional relation between the reticle and the substrate through the projection optical system, a device for imparting displacement to the projection optical system to the position of incidence of the radiation beam onto the projection optical system by the alignment device, a device for outputting a position signal conforming to the relative position of the optic axis of the projection optical system and the position of incidence, and a deflecting device responsive to the position signal to deflect the angle of the principal ray of the radiation beam entering the projection optical system so that the telecentricity of the projection optical system on the substrate side is maintained.