The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 22, 2014
Filed:
Apr. 28, 2011
Kazumasa Endo, Kawasaki, JP;
Kazumasa Endo, Kawasaki, JP;
Nikon Corporation, Tokyo, JP;
Abstract
A defect inspection device and an inspection method which can decide the quality of a pattern shape of a sample surface in a short time are provided. A defect inspection devicethat inspects a defect of a substrate (wafer) on which a repeated pattern is formed includes an illumination optical systemthat has an objective lensand radiates light from a light sourceonto the repeated pattern formed on the wafervia the objective lens, a detection optical systemthat detects an image of a pupil plane of the objective lensproduced by diffracted light of a plurality of orders caused by the repeated pattern and a detection sectionthat detects a defect of the repeated pattern of the waferfrom the pupil image obtained.