The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 01, 2005
Filed:
Mar. 13, 2002
Applicants:
Hideki Obara, Machida, JP;
Kazumasa Endo, Kawasaki, JP;
Inventors:
Hideki Obara, Machida, JP;
Kazumasa Endo, Kawasaki, JP;
Assignee:
Nikon Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 300 ; G11B 700 ;
U.S. Cl.
CPC ...
Abstract
An optical member of the invention is an optical member for photolithography used together with light having a wavelength of not more than 250 nm. The optical member is made of a fluoride crystal in which a maximum diameter d(cm) of scattering bodies existing internally and a quantity nof the scattering bodies per 1 cmsatisfy a condition represented by following formula (1):0<<6.5×10(cm)  (1).