Location History:
- Utsunomiya, JP (2008 - 2013)
- Shimotsuke, JP (2012 - 2016)
Company Filing History:
Years Active: 2008-2016
Title: Kazuki Yamamoto: Innovator in Exposure Technology
Introduction
Kazuki Yamamoto is a prominent inventor based in Utsunomiya, Japan. He has made significant contributions to the field of exposure technology, holding a total of 9 patents. His work primarily focuses on developing advanced exposure apparatuses and methods that enhance device manufacturing processes.
Latest Patents
Yamamoto's latest patents include an exposure apparatus, exposure method, and device manufacturing method. This exposure apparatus is equipped with a light source that emits pulse light to expose a substrate through the pulse light and an original. Additionally, it features a detection unit that measures the light quantity of the pulse light and a controller that manages both the light source and the detection unit. The controller is designed to perform a first calibration process to establish a relationship between the control input to the light source and the light quantity emitted. This process is executed alongside a second calibration process that utilizes multiple pulse lights. Another notable patent involves a wavefront aberration measurement apparatus, which assesses the wavefront aberration of an optical system. This apparatus includes a calculation unit that determines the wavefront aberration based on interference fringes generated by light passing through the optical system, along with a determination unit that evaluates the wavefront state.
Career Highlights
Kazuki Yamamoto is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His innovative work has positioned him as a key figure in the development of cutting-edge exposure technologies.
Collaborations
Yamamoto has collaborated with notable coworkers, including Akihiro Nakauchi and Tadahiro Asaishi. Their combined expertise has contributed to the advancement of technologies in their field.
Conclusion
Kazuki Yamamoto's contributions to exposure technology and his innovative patents reflect his dedication to advancing the field. His work continues to influence device manufacturing processes and enhance optical systems.